AMAT Applied Materials 0100-9066气体面板分析模块

1.产 品 资 料 介 绍：

关键技术参数

主要功能与特点

• 多组分同步分析：可同时检测 O2、N2、CO、CO2、H2、CH4 及 VOCs（如 BTEX）等数十种气体，适用于刻蚀、沉积、清洗等工艺。
• 高灵敏度与快速响应：ppb 级检测能力，秒级反馈，能及时捕捉工艺气体的微小变化。
• 模块化设计：即插即用，可灵活更换色谱柱与检测器，适配不同工艺需求。
• 低载气消耗：约 1 ml/min，降低运行成本并减少废气排放。
• 故障自诊断与报警：内置压力 / 流量传感器，异常时自动报警并触发保护，防止工艺事故。
• 可编程控制：支持自定义分析序列与阈值设定，可与工厂自动化系统集成。

应用领域

• 半导体制造（芯片制造、晶圆加工）
• 平板显示（LCD、OLED）
• 光伏电池生产
• 真空镀膜
• 科研与质量控制实验室

AMAT Applied Materials 0100-9066气体面板分析模块 英文资料：

e777乐彩线路检测AMAT Applied Materials 0100-9066 is a high-precision, modular gas panel analysis module used for real-time online analysis of process gases in semiconductor and flat panel display manufacturing, enabling rapid detection and precise control of multi-component gases.

e777乐彩线路检测Key technical parameters

e777乐彩线路检测Project Indicator Description

Analysis principle: Silicon based microinjection+capillary column separation+NEMS/μ TCD detection for microinjection, with high separation efficiency and good stability

Detection range sub ppm~% can detect permanent gases, light/heavy alkanes VOCs、 Sulfides, etc

Detection limit C6+<1 ppm (VOCs pre concentrated<ppb) suitable for trace analysis

Multi channel synchronous detection with analysis time ranging from seconds to tens of seconds, providing fast feedback

e777乐彩线路检测The typical flow rate of carrier gases He, H2, N2, Ar, and synthetic dry air is about 1 ml/min

Sample pressure>1.5 bar compatible with most process gas supplies

Working temperature of 50~160 ℃ meets the requirements of high-temperature process environment

Size/Weight Approximately 14.7 × 5.15 × 11.4 cm/0.6 kg Compact and easy to integrate

Main functions and features

Multi component synchronous analysis: It can simultaneously detect dozens of gases such as O2, N2, CO, CO2, H2, CH4, and VOCs (such as BTEX), and is suitable for processes such as etching, deposition, and cleaning.

High sensitivity and fast response: ppb level detection capability, second level feedback, able to capture small changes in process gases in a timely manner.

Modular design: plug and play, flexible replacement of chromatography columns and detectors, adaptable to different process requirements.

e777乐彩线路检测Low carrier gas consumption: about 1 ml/min, reducing operating costs and minimizing exhaust emissions.

e777乐彩线路检测Fault self diagnosis and alarm: Equipped with pressure/flow sensors, it automatically alarms and triggers protection in case of abnormalities to prevent process accidents.

e777乐彩线路检测Programmable control: supports custom analysis sequences and threshold settings, and can be integrated with factory automation systems.

e777乐彩线路检测Application field

Semiconductor manufacturing (chip manufacturing, wafer processing)

e777乐彩线路检测Flat panel display (LCD, OLED)

e777乐彩线路检测Photovoltaic cell production

vacuum coating

e777乐彩线路检测Research and Quality Control Laboratory

AMAT Applied Materials 0100-9066气体面板分析模块 e777乐彩线路检测      

 产品视频

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4.其他英文产品

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218