AMAT Applied Materials 0020-04129顶部铰链支架
1.产 品 资 料 介 绍:
技术维度 | 具体参数与实现细节 |
部件属性 | 高精度机械固定类支架,适配半导体设备铰链系统的模块化装配需求 |
安装定位 | 设备上部铰链集成区域,与门盖旋转轴心同轴对齐,安装基准误差≤0.1mm |
核心功能 | 铰链支撑、力矩承载、定位校准,可承受≥10 万次开合循环的机械应力冲击 |
材质体系 | 主体采用 304/316L 不锈钢(含铬≥18%、镍≥8%)或高强度铝合金,部分高端型号选用钛合金复合结构 |
表面工艺 | 经无铬钝化 + 电解抛光处理(Ra≤0.8μm),盐雾测试达 500 小时无红锈,适配洁净室化学腐蚀环境 |
固定机制 | 采用粗牙螺纹螺钉 + 锯齿垫片组合固定,配合铰链销轴实现同轴定位,防振松脱设计通过 10-2000Hz 振动测试 |
- 工艺设备腔体防护:用于光刻、刻蚀设备的真空腔体门盖铰链固定,通过精准的轴心定位确保门体与腔体的密封贴合,避免工艺气体泄漏与外部颗粒侵入。
AMAT Applied Materials 0020-04129顶部铰链支架 英文资料:
e777乐彩线路检测1、 Product positioning and core values
The top hinge bracket of AMAT 0020-04129 serves as the original core structural component of Applied Materials semiconductor equipment, providing rigid support for the hinge system of the upper chamber door cover and maintenance port of the equipment. In the high-frequency operation scenarios of semiconductor manufacturing, it not only undertakes the basic functions of hinge load-bearing and opening and closing torque transmission, but also ensures the sealing and positioning accuracy of door closure through precision structural design. It is a key component to avoid particle pollution caused by mechanical looseness and reduce the risk of equipment shutdown.
2、 Core technical characteristics and process specifications
Technical dimension
Specific parameters and implementation details
e777乐彩线路检测Component Attributes
e777乐彩线路检测High precision mechanical fixed bracket, suitable for modular assembly requirements of semiconductor equipment hinge systems
Installation and positioning
The upper hinge integration area of the equipment is aligned coaxially with the rotation axis of the door cover, and the installation reference error is ≤ 0.1mm
e777乐彩线路检测Core functions
Hinge support, torque bearing, positioning calibration, capable of withstanding mechanical stress impact of ≥ 100000 opening and closing cycles
Material system
e777乐彩线路检测The main body is made of 304/316L stainless steel (chromium ≥ 18%, nickel ≥ 8%) or high-strength aluminum alloy, and some high-end models use titanium alloy composite structure
Surface technology
After chromium free passivation and electrolytic polishing treatment (Ra ≤ 0.8 μ m), salt spray testing for 500 hours without red rust, suitable for chemical corrosion environment in clean rooms
e777乐彩线路检测Fixed mechanism
Using a combination of coarse thread screws and serrated washers for fixation, coupled with hinge pins for coaxial positioning, anti vibration loosening design has passed 10-2000Hz vibration testing
e777乐彩线路检测3、 Scene adaptation and performance advantages
1. Adaptation to Semiconductor Core Scenarios
e777乐彩线路检测Process equipment chamber protection: used for fixing the hinge of the vacuum chamber door cover of lithography and etching equipment, ensuring the sealing fit between the door body and the chamber through precise axis positioning, avoiding process gas leakage and external particle invasion.
AMAT Applied Materials 0020-04129顶部铰链支架 e777乐彩线路检测

产品视频
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AUTOMATION 5AC600.FLAP-K11插槽接口模块
4.其他英文产品
| 6RA2190-4DV60-6DB0-ZA07 | 03-166293-00 | F31X139APMALG2 |
| 6RA2190-4DV60-4JB0-ZA07 | 193X803BGG03 | F31X100CCHBCG1 |
| 6RA2116-6DV60-6DB0-ZA07 | 531X112PSAAMG1 | F31X134EPRBDG1 |
| -6GC11 | 193X803BEG03 | F31X134EPRBAG1 |
| 6ES5998-8MB22 | 531X116SHAAAG1 | 531X308PCSAEG3 |
| 6ES5998-8MA12 | 531X102CCHAEM1 | 740-689986-002 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




