AMAT Applied Materials 0010-21740放大器

1.产 品 资 料 介 绍：

核心规格

功能特点

• 高精度温度测量：内置冷端补偿与线性化算法，确保全量程内的测量稳定。
• 多类型热电偶兼容：可自动识别并适配不同类型热电偶，减少备件种类。
• 隔离设计：有效抑制共模干扰，适用于复杂电磁环境。
• 模块化结构：便于在线更换，缩短维护时间。
• 诊断功能：支持热电偶开路 / 短路检测，提升系统可靠性。

典型应用

• 工艺腔室温度监测与控制
• 快速热处理（RTP）系统温度测量
• 化学气相沉积（CVD）、物理气相沉积（PVD）设备温度反馈控制
• 晶圆传输机器人加热元件温度监控

安装与维护要点

1. 安装
   • 确保放大器安装在通风良好、远离发热元件的位置。
   • 热电偶线应使用屏蔽线，并与电源线分开布线，避免噪声干扰。
   • 电源连接牢固，接地可靠。
2. 校准
   • 初次使用或更换元件后，需进行零点与满量程校准。
   • 使用高精度标准源验证输出信号的准确性。

AMAT Applied Materials 0010-21740放大器 英文资料：

AMAT 0010-21740 is a thermocouple (TC) signal amplifier module designed specifically for 300mm wafer process equipment, used in temperature closed-loop control systems for platforms such as Centura, Endura, P5000, etc.

e777乐彩线路检测Core specifications

Project specification remarks

Type: Thermocouple signal amplifier 4-20 mA or 0-10 V output

Automatic type recognition of input signals K, J, T, E, R, and S-type thermocouples

Output signal 4-20 mA or 0-10 V linear proportional output

Resolution 16 bit ADC accuracy ± 0.1 ℃

Sampling rate of 10 Hz meets the requirements of fast temperature control

Supply voltage 24 VDC ± 10% ripple ≤ 100 mV

Suitable for industrial environments with working temperatures ranging from 0 ℃ to 50 ℃

Isolation input output power three terminal isolation with strong anti-interference ability

Installation method: PCB board mounted, directly loaded into the equipment control board

e777乐彩线路检测Weight approximately 3.83 kg including casing and connectors

Features

High precision temperature measurement: Built in cold end compensation and linearization algorithm to ensure stable measurement across the entire range.

Multi type thermocouple compatibility: It can automatically identify and adapt to different types of thermocouples, reducing the number of spare parts.

Isolation design: effectively suppresses common mode interference and is suitable for complex electromagnetic environments.

Modular structure: easy to ｒｅｐｌａｃｅ online and shorten maintenance time.

Diagnostic function: Supports thermocouple open/short circuit detection to enhance system reliability.

Typical Applications

e777乐彩线路检测Temperature monitoring and control of process chamber

e777乐彩线路检测Temperature measurement of rapid heat treatment (RTP) system

e777乐彩线路检测Temperature feedback control of chemical vapor deposition (CVD) and physical vapor deposition (PVD) equipment

Temperature monitoring of heating elements in wafer transfer robots

e777乐彩线路检测Key points for installation and maintenance

install

Ensure that the amplifier is installed in a well ventilated location away from heating elements.

e777乐彩线路检测Thermocouple wires should be shielded and wired separately from power lines to avoid noise interference.

e777乐彩线路检测The power connection is firm and the grounding is reliable.

calibration

e777乐彩线路检测After initial use or replacement of components, zero and full-scale calibration is required.

Verify the accuracy of the output signal using a high-precision standard source.

AMAT Applied Materials 0010-21740放大器  e777乐彩线路检测      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218