AMAT Applied Materials  0100-90886伺服控制模块

1.产 品 资 料 介 绍：

AMAT Applied Materials 0100-90886 伺服控制模块

核心规格

性能特点

• 高精度定位：支持纳米级分辨率，满足晶圆制造设备的精密定位需求
• 多轴同步控制：各轴间同步误差小于 1 微秒，确保晶圆传输和处理的精确性
• 高速响应：1MHz 控制周期，快速响应工艺变化
• 安全设计：具备过流、过压、过热、位置超限等多重保护功能
• 易于集成：标准接口和开放协议，方便与现有控制系统对接

典型应用

• 晶圆传输机械臂控制
• 腔室门开关与定位系统
• 工艺气体喷头位置控制
• 精密工作台驱动
• 真空阀门控制

AMAT Applied Materials   0100-90886伺服控制模块  英文资料：

e777乐彩线路检测AMAT Applied Materials 0100-90886 Servo Control Module

0100-90886 is a high-precision servo control module launched by Applied Materials, designed specifically for precision motion control in semiconductor manufacturing equipment, widely used in platforms such as Centura, Endura, P5000, etc.

e777乐彩线路检测Core specifications

e777乐彩线路检测Project specification remarks

e777乐彩线路检测Suitable for platforms such as Centura, Endura, P5000, Producer, etc. to adapt to multi chamber wafer manufacturing systems

e777乐彩线路检测Control axis number 1-4 (can be cascaded and expanded) supports stepper/servo motors

e777乐彩线路检测High precision PID control with three control modes: position, speed, and torque

Communication interfaces RS-485, EtherNet/IP, SECS/GEM support factory automation integration

e777乐彩线路检测Encoder interface incremental/absolute encoder supports high-resolution feedback

e777乐彩线路检测Input voltage 24VDC control power supply motor power supply needs to be provided additionally

Working temperature 0-40 ° C, it is recommended to use forced air cooling

Size standard 3U rack mounted for easy system integration

Installation inside control cabinet with protection level IP20

Performance Characteristics

High precision positioning: Supports nanometer level resolution to meet the precise positioning requirements of wafer manufacturing equipment

e777乐彩线路检测Multi axis synchronous control: The synchronization error between each axis is less than 1 microsecond, ensuring the accuracy of wafer transfer and processing

High speed response: 1MHz control cycle, fast response to process changes

e777乐彩线路检测Safety design: equipped with multiple protection functions such as overcurrent, overvoltage, overheating, and position exceeding limits

Easy to integrate: standard interfaces and open protocols for easy integration with existing control systems

Typical Applications

Control of wafer transfer robotic arm

Chamber door switch and positioning system

e777乐彩线路检测Process gas nozzle position control

Precision worktable driver

Vacuum valve control

AMAT Applied Materials   0100-90886伺服控制模块 e777乐彩线路检测      

 产品视频

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4.其他英文产品

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

e777乐彩线路检测Contact: +86 15270269218