AMAT Applied Materials  0010-08670顶盖

1.产 品 资 料 介 绍：

关键参数

性能特点

• 高精度密封：在温度波动 ±2℃时，密封面形变量仅约 0.01 mm，有效延长密封圈寿命。
• 低应力设计：与腔体材料热膨胀系数匹配，降低热循环应力，防止密封失效。
• 耐腐蚀性强：内侧硬质氧化层可耐受等离子体、酸碱等工艺环境。
• 易于维护：重量轻，支持双人快速更换，减少停机时间。

典型应用

• 刻蚀（Etch）与化学气相沉积（CVD）系统
• 物理气相沉积（PVD）与原子层沉积（ALD）系统
• 离子注入机及晶圆传输腔室

AMAT Applied Materials  0010-08670顶盖 英文资料：

The top cover of AMAT Applied Materials 0010-08670 is a sealed end cover for semiconductor equipment vacuum chambers. The material is usually corrosion-resistant 5083 aluminum alloy, and the surface is treated with hard anodizing. It can work stably for a long time in an environment with a vacuum degree of 10 ⁻⁵  Pa at 0-40 ℃.

e777乐彩线路检测key parameters

e777乐彩线路检测Project specification remarks

e777乐彩线路检测Suitable for multi chamber platforms such as Centura, Endura, P5000, etc. to adapt to 200mm/300mm wafer processes

Material: 5083 aluminum alloy, corrosion-resistant, low stress, thermal expansion coefficient matched with the cavity

e777乐彩线路检测Surface treatment: Hard anodizing (inner side) film thickness meets SEMATECH standards

Sealing form: Metal sealing ring or fluororubber O-ring can withstand acid, alkali and plasma corrosion

Customized external dimensions, commonly ranging from Φ 800 to 1000 mm depending on the diameter of the cavity

Weight ≈ 80-150 kg, reduced by about 50% compared to stainless steel

Working temperature 0-40 ℃, recommended temperature control ± 2 ℃

e777乐彩线路检测Vacuum level 10 ⁻⁵  Pa leakage rate<1 × 10 ⁻⁹  mbar · L/s

e777乐彩线路检测Certification: SEMI S2, CE, UL comply with semiconductor industry safety standards

e777乐彩线路检测Performance Characteristics

e777乐彩线路检测High precision sealing: When the temperature fluctuates by ± 2 ℃, the deformation of the sealing surface is only about 0.01 mm, effectively extending the life of the sealing ring.

Low stress design: matched with the thermal expansion coefficient of the cavity material, reducing thermal cycling stress and preventing seal failure.

Strong corrosion resistance: The inner hard oxide layer can withstand process environments such as plasma, acid and alkali.

e777乐彩线路检测Easy to maintain: lightweight, supports quick replacement by two people, reduces downtime.

Typical Applications

Etch and CVD systems

Physical Vapor Deposition (PVD) and Atomic Layer Deposition (ALD) Systems

Ion implantation machine and wafer transfer chamber

AMAT Applied Materials   0010-08670顶盖  e777乐彩线路检测      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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