AMAT Applied Materials 0010-42744射频匹配器

1.产 品 资 料 介 绍：

核心功能

• 自动调谐：内置伺服电机驱动可变电容和电感，实时跟踪负载阻抗变化
• 反射功率抑制：通过定向耦合器和相位 / 幅度检测，闭环调节使反射功率最小化
• 功率范围：典型支持 0–1000W 射频功率，适配多种工艺设备
• 频率特性：固定工作于 13.56MHz（工业标准等离子体激发频率）
• 通信接口：提供 RS-485、Ethernet 或专用总线，支持与上位机 / 控制器集成

技术特点

典型应用

• 刻蚀设备：射频耦合腔、极板匹配
• PECVD 沉积设备：反应腔阻抗匹配
• 溅射设备：靶材射频功率高效传输
• 离子注入机：射频源与匹配网络优化

AMAT Applied Materials 0010-42744射频匹配器 英文资料：

e777乐彩线路检测AMAT Applied Materials 0010-42744 is an automatic RF matching device used to dynamically match the impedance of RF power sources and loads (such as reaction chambers and plasma sources) in semiconductor manufacturing equipment, achieving efficient power transmission in the 13.56MHz frequency band and reducing reflected power.

core functionality

Automatic tuning: Built in servo motor drives variable capacitors and inductors, real-time tracking of load impedance changes

Reflection power suppression: By using directional couplers and phase/amplitude detection, closed-loop adjustment minimizes the reflection power

e777乐彩线路检测Power range: Typical support for 0-1000W RF power, compatible with various process equipment

Frequency characteristics: Fixed operating at 13.56MHz (industrial standard plasma excitation frequency)

e777乐彩线路检测Communication interface: Provides RS-485, Ethernet or dedicated bus, supports integration with upper computer/controller

e777乐彩线路检测Technical Features

Project parameters/characteristics

Frequency 13.56MHz (fixed)

Power capacity 0-1000W (typical value)

e777乐彩线路检测Matching range 5-500 Ω (adjustable)

Typical tuning time<100ms (full range)

e777乐彩线路检测Interface form: N-type or SMA RF interface

e777乐彩线路检测Protection functions include over power, over reflection, and over heat protection

Mechanical specification standard 19 "rack or chassis installation

Typical Applications

Etching equipment: RF coupling cavity, electrode matching

PECVD deposition equipment: impedance matching of reaction chamber

Sputtering equipment: efficient transmission of target RF power

e777乐彩线路检测Ion implantation machine: RF source and matching network optimization

AMAT Applied Materials  0010-42744射频匹配器 e777乐彩线路检测      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218