AMAT Applied Materials 0190-76190 压力控制器

1.产 品 资 料 介 绍：

核心技术参数

功能特点

• 自动 PID 调节：内置可调节 PID 参数，确保快速稳定控制。
• 双通道控制：可同时控制进气和排气阀门，实现真空与正压双向调节。
• 多量程切换：根据工艺需求灵活切换不同测量范围，保证全量程高精度。
• 保护功能：具备过压、欠压、传感器故障报警及自动切断输出。
• 远程监控：通过数字或模拟接口实现远程设定与实时数据采集。

典型应用

• 半导体刻蚀、PECVD、溅射设备的腔室压力控制
• 真空镀膜、电子束蒸发系统的真空度调节
• 高温炉、真空炉的压力稳定控制
• 实验室气体流量与压力联合控制系统

AMAT Applied Materials 0190-76190 压力控制器 英文资料：

The AMAT Applied Materials 0190-76190 pressure controller is a high-precision, programmable closed-loop pressure control module mainly used in semiconductor manufacturing, vacuum coating, plasma processes and other equipment to achieve stable regulation and monitoring of gas or liquid pressure.

Core technical parameters

Typical parameter notes for the project

Pressure measurement range 0-1000 Torr (optional 10-1000 Torr, 1-100 Torr, 0.1-10 Torr) Capacitive thin film sensor (CDG)

e777乐彩线路检测Control accuracy ± 0.1% F.S. temperature compensation design

Resolution 0.1 mTorr (low range) -1 Torr (high range) configurable

e777乐彩线路检测Response time ≤ 100 ms PID closed-loop control

Communication interface RS-232, 0-5 V, 0-10 V, 4-20 mA (optional EtherCAT, Profibus) supports Modbus RTU

e777乐彩线路检测Display mode: 4-digit LCD display (pressure/status) with switchable units (Torr, mTorr, Pa, bar, psi)

e777乐彩线路检测Power supply 24 VDC (18-30 VDC wide voltage) power consumption<10 W

e777乐彩线路检测Pressure interface VCR or NPT 1/4 "customizable

e777乐彩线路检测Working temperature/humidity 0-50 ℃, ≤ 90% RH (non condensing), suitable for industrial grade environments

e777乐彩线路检测Mechanical size 1/2 or 1/4 rack installation support panel/rail installation

Features

Automatic PID regulation: Built in adjustable PID parameters to ensure fast and stable control.

e777乐彩线路检测Dual channel control: It can simultaneously control the intake and exhaust valves, achieving bidirectional adjustment of vacuum and positive pressure.

e777乐彩线路检测Multi range switching: Flexibly switch different measurement ranges according to process requirements to ensure high precision across the entire range.

Protection function: equipped with overvoltage, undervoltage, sensor fault alarm and automatic output cut-off.

e777乐彩线路检测Remote monitoring: Remote setting and real-time data collection are achieved through digital or analog interfaces.

Typical Applications

Semiconductor etching PECVD、 Chamber pressure control of sputtering equipment

e777乐彩线路检测Vacuum degree adjustment of vacuum coating and electron beam evaporation system

Pressure Stability Control of High Temperature and Vacuum Furnaces

e777乐彩线路检测Laboratory gas flow and pressure joint control system

AMAT Applied Materials  00190-76190 压力控制器 e777乐彩线路检测      

 产品视频

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4.其他英文产品

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218