AMAT Applied Materials 0090-77327电子流量计

1.产 品 资 料 介 绍：

核心规格

功能特点

• 高精度测量：小口径设计，分辨率高，适合微量液体流量监测。
• 耐腐蚀能力强：PVDF/PFA/ 陶瓷内衬及多种电极材质，适应多种化学介质。
• 抗干扰能力强：全数字信号处理，光电隔离，适应复杂电磁环境。
• 信号多样：4–20 mA、脉冲、RS485 输出，便于接入 PLC 或上位机。
• 低压力损失：插入式结构，对管道压力影响小。

典型应用

• 晶圆传输系统冷却水流量监测
• 工艺腔室 DI 水供应监控
• 化学品输送管道流量控制
• 去离子水系统计量

AMAT Applied Materials  0090-77327电子流量计 英文资料：

AMAT 0090-77327 is a high-precision, corrosion-resistant plug-in electronic flowmeter designed by Applied Materials for semiconductor equipment cooling and process fluid monitoring. It adopts the principle of electromagnetic induction and is suitable for flow measurement of cooling water, deionized water, and low concentration acid alkali solutions on platforms such as Centura, Endura, P5000, etc.

Core specifications

e777乐彩线路检测Project specifications/characteristics remarks

e777乐彩线路检测Type: Plug in electromagnetic flowmeter suitable for small-diameter pipelines

Measurement medium: Conductive liquid (≥ 20 μ S/cm), cooling water, DI water, weak acid-base solution

Caliber DN10- DN20 (optional) Customized small caliber

e777乐彩线路检测High precision measurement with an accuracy of ± 0.5% FS (v>0.6 m/s) or ± 3 mm/s (v ≤ 0.6 m/s)

Flow velocity range 0.01-10 m/s bidirectional measurement

Lining materials PVDF, PFA, ceramic resistant to chemical corrosion

e777乐彩线路检测Electrode material 316L stainless steel, titanium, tantalum suitable for different media

e777乐彩线路检测Supply voltage 24 VDC ± 10% industrial standard power supply

Output signal 4-20 mA, pulse, RS485 (Modbus RTU) compatible with AMAT control system

Operating temperature 0-50 ℃, suitable for internal environment of equipment

e777乐彩线路检测Protection level IP65 dustproof and waterproof

e777乐彩线路检测Installation method: threaded or flange insertion for easy on-site installation

Features

High precision measurement: small aperture design, high resolution, suitable for monitoring trace liquid flow.

Strong corrosion resistance: PVDF/PFA/ceramic lining and various electrode materials, suitable for various chemical media.

Strong anti-interference ability: fully digital signal processing, optoelectronic isolation, adaptable to complex electromagnetic environments.

Diverse signals: 4-20 mA, pulse, RS485 output, easy to connect to PLC or upper computer.

Low pressure loss: Plug in structure with minimal impact on pipeline pressure.

Typical Applications

Monitoring of cooling water flow in wafer transfer system

e777乐彩线路检测Process chamber DI water supply monitoring

Flow control of chemical transportation pipelines

e777乐彩线路检测Deionized water system metering

AMAT Applied Materials 0090-77327电子流量计 e777乐彩线路检测      

 产品视频

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

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