AMAT Applied Materials 0225-33921控制器装置 

1.产 品 资 料 介 绍：

核心规格

功能特点

• 多任务并行处理：可同时管理刻蚀、PVD/CVD、离子注入等工艺步骤。
• 故障诊断与安全联锁：实时监测设备状态，异常时自动停机。
• 高可靠性设计：冗余电源与关键部件备份，降低停机风险。
• 模块化扩展：可灵活增减 I/O 模块，适应不同工艺需求。
• 快速系统集成：支持 SECS/GEM 协议，可快速接入现有自动化生产线。

典型应用

• 刻蚀（Etch）与化学气相沉积（CVD）系统
• 物理气相沉积（PVD）与原子层沉积（ALD）系统
• 离子注入机与晶圆传输系统

AMAT Applied Materials 0225-33921控制器装置 英文资料：

The AMAT Applied Materials 0225-33921 controller device is the central logic control unit of wafer manufacturing equipment. It adopts a modular design, integrates multi-channel I/O, real-time control, and high-speed communication functions, and can accurately coordinate the process, transmission, and detection flow of multi chamber systems.

e777乐彩线路检测Core specifications

Project specification remarks

e777乐彩线路检测Suitable for multi chamber devices such as Centura, Endura, Sym3, etc., supporting 200mm/300mm wafers

e777乐彩线路检测Control architecture real-time operating system (VxWorks) ensures timing accuracy and stability

Communication interfaces SECS/GEM, EtherNet, RS-485 support factory automation integration

I/O configuration with digital input/output and analog input/output expandable to hundreds of channels

e777乐彩线路检测Dual redundant 24 VDC power input supports hot swapping

Working temperature 0-40 ℃ requires air cooling or temperature controlled environment

e777乐彩线路检测Size standard 1U/2U rack mounted for easy installation and maintenance

e777乐彩线路检测Certification: SEMI S2, CE, UL comply with semiconductor industry safety standards

Features

Multi task parallel processing: capable of simultaneously managing etching PVD/CVD、 Process steps such as ion implantation.

Fault diagnosis and safety interlock: Real time monitoring of equipment status, automatic shutdown in case of abnormalities.

High reliability design: redundant power supply and critical component backup to reduce downtime risk.

e777乐彩线路检测Modular expansion: It can flexibly add or remove I/O modules to adapt to different process requirements.

e777乐彩线路检测Fast system integration: Supports SECS/GEM protocol and can quickly integrate into existing automated production lines.

Typical Applications

Etch and CVD systems

Physical Vapor Deposition (PVD) and Atomic Layer Deposition (ALD) Systems

e777乐彩线路检测Ion implantation machine and wafer transfer system

AMAT Applied Materials  0225-33921控制器装置 e777乐彩线路检测      

 产品视频

3.其他产品

ZM-40-PKZ2电机保护行程块
LDSYN-101 3BHE005555R0101电源模块
RM302024继电器

4.其他英文产品

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218