AMAT Applied Materials DIP-510-002互锁模块

1.产 品 资 料 介 绍：

AMAT Applied Materials DIP-510-002 互锁模块

核心功能

• 安全状态监控：实时监测设备各安全门、防护盖的开关状态
• 联锁控制逻辑：当安全装置被触发（如舱门打开）时，立即切断危险区域动力或工艺电源
• 紧急停止集成：兼容紧急停止按钮信号，实现全局安全控制
• 状态反馈：提供清晰的指示灯或电信号，显示各联锁点状态
• 故障诊断：内置自检功能，可快速定位故障联锁点

技术特点

• 安全等级：符合 SEMI S2 半导体设备安全标准，支持 SIL 2 安全等级
• 输入通道：多通道设计（通常 4-8 路），可监控多个联锁点
• 响应时间：毫秒级快速响应，确保危险状态下的即时保护
• 输出类型：安全继电器输出，支持强制断开功能
• 电气隔离：各通道间电气隔离，防止信号干扰
• 工作环境：0-50℃，适应半导体洁净室及设备内部环境

典型应用

• 刻蚀 / 沉积设备：监控反应室舱门、维护门的开关状态
• 离子注入机：防护盖联锁与辐射安全控制
• 晶圆传输系统：自动化搬运机构的安全区域防护
• 光刻设备：光学系统维护门与激光安全联锁
• 清洗设备：化学品处理舱的安全防护监控

安装与维护建议

1. 安装要点
   • 严格按照安全规范布线，区分安全回路与普通信号
   • 确保接地可靠，提高抗干扰能力
   • 安装位置便于观察状态指示灯和维护操作
2. 运行维护
   • 定期测试联锁功能，验证紧急停止响应
   • 清洁模块表面，保持散热良好
   • 记录联锁触发历史，分析潜在安全风险

AMAT Applied Materials DIP-510-002互锁模块 英文资料：

AMAT Applied Materials DIP-510-002 Interlock Module

e777乐彩线路检测AMAT DIP-510-002 is a safety interlock module designed specifically for semiconductor manufacturing equipment. It is used to monitor the status of equipment doors, protective devices, and critical operating components, ensuring that the equipment operates under safe conditions and preventing safety risks caused by personnel misoperation or equipment abnormalities.

e777乐彩线路检测core functionality

Safety status monitoring: Real time monitoring of the opening and closing status of each safety door and protective cover of the equipment

Interlocking control logic: When the safety device is triggered (such as opening the cabin door), immediately cut off the power or process power supply in the dangerous area

Emergency stop integration: compatible with emergency stop button signals, achieving global safety control

e777乐彩线路检测Status feedback: Provide clear indicator lights or electrical signals to display the status of each interlocking point

e777乐彩线路检测Fault diagnosis: Built in self-test function, can quickly locate the fault interlock point

e777乐彩线路检测Technical Features

Safety level: Complies with SEMI S2 semiconductor equipment safety standards and supports SIL 2 safety level

Input channel: Multi channel design (usually 4-8 channels), capable of monitoring multiple interlocking points

Response time: millisecond level fast response, ensuring immediate protection in dangerous situations

Output type: safety relay output, supporting forced disconnection function

Electrical isolation: Electrical isolation between channels to prevent signal interference

e777乐彩线路检测Working environment: 0-50 ℃, suitable for semiconductor cleanrooms and internal equipment environments

e777乐彩线路检测Typical Applications

e777乐彩线路检测Etching/deposition equipment: monitor the opening and closing status of the reaction chamber door and maintenance door

e777乐彩线路检测Ion implantation machine: protective cover interlock and radiation safety control

e777乐彩线路检测Wafer Transfer System: Safe Area Protection for Automated Handling Mechanisms

Lithography equipment: Optical system maintenance door and laser safety interlock

Cleaning equipment: safety protection monitoring of chemical processing compartments

Installation and maintenance recommendations

e777乐彩线路检测Installation key points

e777乐彩线路检测Strictly follow safety regulations for wiring, distinguish between safety circuits and ordinary signals

e777乐彩线路检测Ensure reliable grounding and improve anti-interference ability

The installation location is convenient for observing the status indicator lights and maintenance operations

operation and maintenance

Regularly test the interlocking function and verify the emergency stop response

e777乐彩线路检测Clean the surface of the module to maintain good heat dissipation

Record interlocking triggering history and analyze potential safety risks

AMAT Applied Materials  DIP-510-002互锁模块 e777乐彩线路检测      

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

e777乐彩线路检测Contact: +86 15270269218