AMAT Applied Materials 0010-00557热交换器

1.产 品 资 料 介 绍：

核心参数

产品特点

• 高效传热：采用紧凑型设计，增大换热面积，提升冷却效率，降低能耗。
• 耐腐蚀：选用耐酸、碱、有机溶剂的材料，适应强化学环境。
• 低流阻：优化流道设计，减小压降，确保介质稳定循环。
• 易维护：模块化结构，支持在线快速更换，减少停机时间。

典型应用

• 刻蚀机、PVD/CVD 沉积设备的工艺气体预冷
• 离子注入机靶台冷却系统
• 光刻机曝光光学系统温控
• 扩散炉载气冷却

AMAT Applied Materials  0010-00557热交换器 英文资料：

Applied Materials 0010-00557 is an efficient heat exchanger designed specifically for semiconductor manufacturing equipment, used for precise temperature control of cooling media during wafer processing to ensure process stability and equipment reliability.

Core parameters

Project specifications

e777乐彩线路检测Brand/Model Applied Materials 0010-00557

e777乐彩线路检测Scope of application: Equipment that requires precise temperature control, such as semiconductor etching, deposition, ion implantation, etc

e777乐彩线路检测Structural form: Plate fin or brazed plate (depending on the model)

Design pressure ≤ 2.0 MPa (some models can reach up to 3.0 MPa)

Design temperature -20~150 ℃

e777乐彩线路检测Material body: stainless steel/copper alloy; Sealing: High temperature resistant fluororubber

Heat transfer coefficient 2500-5000 W/(㎡· K) (depending on operating conditions)

e777乐彩线路检测Interface type quick connect flange or threaded connection, common sizes DN25, DN40

e777乐彩线路检测Cleanliness meets SEMI S2/S8 standards and is suitable for high cleanliness environments

Product Features

Efficient heat transfer: adopting a compact design, increasing the heat transfer area, improving cooling efficiency, and reducing energy consumption.

Corrosion resistance: Materials that are resistant to acid, alkali, and organic solvents are selected to adapt to strong chemical environments.

Low flow resistance: Optimize channel design, reduce pressure ｄｒｏｐ, and ensure stable circulation of the medium.

Easy to maintain: Modular structure, supports online quick replacement, reduces downtime.

e777乐彩线路检测Typical Applications

Pre cooling of process gases for etching machines and PVD/CVD deposition equipment

Cooling system for ion implantation machine target platform

Temperature control of lithography machine exposure optical system

e777乐彩线路检测Diffusion furnace carrier gas cooling

AMAT Applied Materials  0010-00557热交换器 e777乐彩线路检测      

 产品视频

3.其他产品

4.其他英文产品

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

e777乐彩线路检测Contact: +86 15270269218